Instrument Image

Stylus Profilometer

Used to measure thin film thickness (step height), surface roughness, waviness and wafer stress. Suitable for micro to nano-scale surface topography measurements.

Manufacturer: Bruker AXS Pte. Ltd., Singapore

Model: DEKTAK 150

Applications

  • Thin film thickness measurement
  • Surface roughness analysis
  • Waviness measurement
  • Wafer stress analysis
  • Surface topography

Sample Requirements

  • Sample preparation guidelines: Thick or thin film samples in solid form.

Internal (KBCNMU): β‚Ή 400

External Academic: β‚Ή 600

Industry: β‚Ή 1000

GST 18% extra

Contact Information

Prof. Jaydeep Vinayak Sali
Instrument In-charge
πŸ“§ jvsali@nmu.ac.in
πŸ“ž 8421806270

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