Instrument Image

Plasma Enhanced Atomic Layer Deposition System (PEALD)

Deposition of gate dielectrics for transistors and DRAM capacitors as devices scale down to the nanometer regime. Creating ultra-thin, dense layers to prevent metal diffusion (like copper) into insulating layers or to act as barriers in solar cells. Used for sidewall spacers in 3D structures and for double patterning technology (DPT). Fabrication of seed layers and electrodes in advanced CMOS nodes. Deposition of buffer layers and surface passivation layers to improve the efficiency and stability of CIGS and silicon solar cells. Protective coatings on electrodes (e.g., lithium-ion batteries) to prevent degradation, dendrite growth, and chemical shorting. Manufacturing high-precision anti-reflective coatings (ARCs), optical filters, and mirrors on large or complex 3D substrates. Encapsulation and moisture/oxygen barrier layers (e.g., for OLEDs) on temperature-sensitive plastic substrates.

Manufacturer: Indigenously Developed

Model: Indigenously Developed

Applications

  • Combining Scanning Probe Microscopy (SPM) with Raman Spectroscopy creates powerful tools like Tip-Enhanced Raman Spectroscopy (TERS) for Nano-scale chemical mapping
  • allowing simultaneous study of surface topography (SPM) and molecular vibrations (Raman). Applications span materials science
  • biology
  • and chemistry
  • enabling detailed analysis of polymers
  • biomolecules
  • catalysts
  • and defects with high spatial resolution (down to individual molecules) for understanding structure
  • composition
  • and dynamic processes. To image the topography of a sample surface by scanning the cantilever over a region of interest of various materials like thin and thick coatings
  • ceramics
  • composites
  • glasses
  • synthetic & biological membranes
  • metals
  • semiconductors
  • polymers
  • etc. Raman spectroscopy is a qualitative tool for identifying molecules from their vibrations especially in conjunction with infrared spectrometry. Raman spectroscopy can be used to observe other low frequency excitations of the solid
  • such as Plasmon
  • magnons and superconducting gap excitations.

Sample Requirements

  • Sample Preparation Guidelines
  • Semiconductor Wafers

Internal (KBCNMU): β‚Ή Rs.400 per Sample

External Academic: β‚Ή Rs.600 per Sample (18% GST extra)

Industry: β‚Ή Rs.800 per Sample (18% GST extra

GST GST included% extra

Contact Information

Prof. Jaydeep Vinayak Sali
Instrument In-charge
πŸ“§ jvsali@nmu.ac.in
πŸ“ž 9421605270

Ready to Book?

Complete the booking form to request instrument access